Helmut Fischer FISCHERSCOPE X-RAY XDV-µ series – microstructure measurement with polycapillary optics

Applications

For the electronics and semiconductor industry – for measuring conductor tracks, contacts, lead frames, SMD components, thin wires and complex multilayer systems, and the phosphorus content of electroless nickel layers under gold and palladium (ENIG/ENEPIG). Fischer is the only XRF manufacturer with its own production of polycapillary optics.

Key features

• “Ultra” microfocus tube and polycapillary optics – high intensity in the smallest spots
• DPP+ – up to 50 % higher performance compared with DPP
• Programmable measurements based on pattern recognition; fully automatable with one click
• Video system with threefold optical zoom
• LD: largest measuring distance in its class of 12 mm, XY stage with ≤ 2 µm positioning accuracy
• WAFER: vacuum stage for wafers of all standard formats 150–300 mm

Models

XDV-µ (spot approx. Ø 10 or 17 µm, samples up to 135 mm); XDV-µ LD (spot approx. Ø 35 µm, distance 12 mm, up to 135 mm); XDV-µ WAFER (wafers 6–12 in., sample up to 5 mm). Polycapillary options: 10 µm without halo, 20 µm without halo, 20 µm with halo

Technical data

• X-ray tube: “Ultra” microfocus, tungsten anode (molybdenum optional)
• Detector: SDD 20 or 50 mm²
• Measuring spot: XDV-µ approx. Ø 10 / 17 µm; LD approx. Ø 35 µm
• Measuring distance: LD – 12 mm
• Sample height: up to 135 mm (XDV-µ, LD); up to 5 mm (WAFER)
• Filters: interchangeable (WAFER – 4 interchangeable)
• Coatings: < 0.1 µm; Au/Pd < 10 nm (WAFER)
• Software: WinFTM

What we offer

• Selection of the instrument and configuration for your task, together with the manufacturer
• Trial measurements of your samples in the manufacturer’s laboratory
• Training, calibration and service organised through the manufacturer

Request a quote

Technical data according to the manufacturer: helmut-fischer.com, helmut-fischer.com